Product information:
KEYENCE LM-1000 image dimension measurement controller
Type: Controller.
Image sensor: 1″ 20 megapixel monochrome CMOS sensor.
Screen: 10.4″ LCD (XGA: 1024 × 768).
Lens: Dual telecentric lens.
Measure pictures:
Field of view:
Wide field measurement mode: 225 mm × 125 mm.
High precision measuring mode: 206 mm × 106 mm.
Minimum display unit: 0.1 μm.
Repeatability:
Field of view of internal camera (2 ohms):
Wide field measurement mode: ±0.5 μm.
High precision measurement mode: ±0.1 μm.
With stage movement (X/Y axis): ±0.9 μm.
Measurement accuracy:
Field of view of internal camera (2 ohms):
Wide field measurement mode: ±2 µm *1.
High precision measurement mode: ±0.7 µm *2.
With stage movement (X/Y axis – EUX, MPE, EUY, MPE): ±(1.8 + 0.02 L) µm *3.
Height measurement:
Repeatability: ±2 μm.
Measurement accuracy (EUZ, MPE): ±(4.8 + 0.04 L) µm *4.
Storage: 500 GB hard drive.
Lighting system: Telecentric transparent, four-split ring lighting, multi-angle lighting (electric), slit ring (directional) lighting (electric), telecentric coaxial lighting.
External lighting control: Intensity control, PWM control, 100 kHz.
Output voltage: 12 VDC, output current: 1.6 A (maximum).
Power supply: Power supply voltage 100 to 240 VAC ±10% (50/60 Hz), power consumption 430 VA or less.
Environmental resistance: Ambient temperature +10 to 35°C, ambient humidity 20 to 80% RH (non-condensing).
Overvoltage type: II.
Pollution level: 2.
Weight: Approx. 8 kg.
KEYENCE LM-1000 image dimension measurement controller
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Product information:
KEYENCE LM-1000 image dimension measurement controller
Type: Controller.
Image sensor: 1″ 20 megapixel monochrome CMOS sensor.
Screen: 10.4″ LCD (XGA: 1024 × 768).
Lens: Dual telecentric lens.
Measure pictures:
Field of view:
Wide field measurement mode: 225 mm × 125 mm.
High precision measuring mode: 206 mm × 106 mm.
Minimum display unit: 0.1 μm.
Repeatability:
Field of view of internal camera (2 ohms):
Wide field measurement mode: ±0.5 μm.
High precision measurement mode: ±0.1 μm.
With stage movement (X/Y axis): ±0.9 μm.
Measurement accuracy:
Field of view of internal camera (2 ohms):
Wide field measurement mode: ±2 µm *1.
High precision measurement mode: ±0.7 µm *2.
With stage movement (X/Y axis – EUX, MPE, EUY, MPE): ±(1.8 + 0.02 L) µm *3.
Height measurement:
Repeatability: ±2 μm.
Measurement accuracy (EUZ, MPE): ±(4.8 + 0.04 L) µm *4.
Storage: 500 GB hard drive.
Lighting system: Telecentric transparent, four-split ring lighting, multi-angle lighting (electric), slit ring (directional) lighting (electric), telecentric coaxial lighting.
External lighting control: Intensity control, PWM control, 100 kHz.
Output voltage: 12 VDC, output current: 1.6 A (maximum).
Power supply: Power supply voltage 100 to 240 VAC ±10% (50/60 Hz), power consumption 430 VA or less.
Environmental resistance: Ambient temperature +10 to 35°C, ambient humidity 20 to 80% RH (non-condensing).
Overvoltage type: II.
Pollution level: 2.
Weight: Approx. 8 kg.